LMS Technologies Vietnam

Nano Imprint Lithography

Eitre 3

The EITRE® 3 systems are very versatile tools for areas in solid-state lighting, micro optical and photonic components, patterned media, bio-medical and life science, lab-o-chip, MEMS/NEMS and semiconductors.All Nano Imprint Lithography (NIL) systems can be configured to perform full area imprint based on patented SoftPress® technology. The unique and superior design of the heater, embedded in the substrate chuck, provides a uniform temperature distribution across the whole imprint area. This excellent temperature control and flexible setting possibilities, makes it possible to use a wide range of imprint polymer.
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