Easyline Table Top
The Easyline manual Lab Spinner Modules are economical modules that can be bench mounted or work as table top process tools. It provides high uniformity and repeatability. The system is equipped with easy operation platform. The ObducatEasyline Lab Spinner Modules can be designed for Cleaning, Coating, Drying , Rinsing, Etching or Developingapplications.
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Features
Features
- Wafer size up to Ø 12″ (Ø 300 MM) or substrate size up to 9″ X 9″ (230 mm X 230 mm)
- Simple change over from Ø 2″ – 12″ wafers and up to 9″ X 9″ substrates
- Programmable spin speed UP TO 6.000 rpm
- Manual switch for chuck vacuum with vacuum gauge
- Color touch screen allows easy operation
- Transparent cover lid with safety interrupt sensor
- CE marked